Diffusion vacuum pump plating machine back to the oil repair points

Back to the proliferation of pump oil how to do, if the vacuum regulation is not damaged, back to the oil generally do not need to be repaired, the main cleaning vacuum chamber diffusion pump oil. It is best to use gasoline to wipe the wall of the vacuum chamber all over again rub it with alcohol. Oil must be clean is the most critical, if the room there is the presence of oil, there will be plated white film, the film quality is not good and so on, not because of the damage to the plating equipment, but because the vacuum chamber has oil. Diffuse vacuum pump electroplating machine back to the main points of maintenance diffusion pump back to the oil may be the following problems: 1, the cooling water is not smooth or water pressure is not enough, resulting in decreased cooling capacity, diffusion pump heat up the upper part of the oil vapor can not be good liquefaction. The solution will be diffusion pump inlet connected to 4mpa gas source, blowing out scale, then out of the water pipe to 4mpa blow. If the scale of a lot of solid and solid, can pass into dilute hydrochloric acid. Or replace the diffusion pump. 2, the heating temperature is too high, due to diffusion pump heater power and rated power does not match, too high, resulting in a large amount of steam, can cause back to oil, replace the electric wire can be resolved. 3, the amount of fuel is too high, the amount of fuel easily lead to slow steam cycle, to the lower level of compression retention, resulting in back to oil, according to the manufacturer to provide information on the amount of fuel control can be avoided. 4, oil oxidation, diffusion pump oil oxidation, viscosity and steam flow are affected, up to the jet speed, naturally returned to the vacuum chamber. Spread the pump can be removed, the pump out of the heart, with 120 # gasoline cleaning, and then polished, the carbon and black oxide layer polished off, again with 120 # gasoline cleaning, drying, and then install, into the diffusion pump oil Or silicone oil, heated several times before they can put into work. Prevent contamination of the workpiece. 5, if the proliferation of pump service more than 8-10 years, or use in harsh environments, consider replacing. Improve work efficiency and maintenance costs. (Editor: Li Juan QQ:) Recommended reading: Acting purchasing the top ten brands of vacuum pumps

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